发明名称 STRUCTURES OF AND METHODS FOR FORMING VERTICALLY ALIGNED Si WIRE ARRAYS
摘要 A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.
申请公布号 US2009020853(A1) 申请公布日期 2009.01.22
申请号 US20080176099 申请日期 2008.07.18
申请人 KAYES BRENDAN M;FILLER MICHAEL A;LEWIS NATHAN S;ATWATER HARRY A 发明人 KAYES BRENDAN M.;FILLER MICHAEL A.;LEWIS NATHAN S.;ATWATER HARRY A.
分类号 H01L21/20;H01L29/06 主分类号 H01L21/20
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