发明名称 |
STRUCTURES OF AND METHODS FOR FORMING VERTICALLY ALIGNED Si WIRE ARRAYS |
摘要 |
A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.
|
申请公布号 |
US2009020853(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20080176099 |
申请日期 |
2008.07.18 |
申请人 |
KAYES BRENDAN M;FILLER MICHAEL A;LEWIS NATHAN S;ATWATER HARRY A |
发明人 |
KAYES BRENDAN M.;FILLER MICHAEL A.;LEWIS NATHAN S.;ATWATER HARRY A. |
分类号 |
H01L21/20;H01L29/06 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|