LINE BEAM LASER APPARATUS AND SURFACE MEASUREMENT APPARATUS USING THE SAME

摘要

The line beam laser apparatus and surface measurement apparatus using the same are provided to obtain the line beam of the uniform intensity by using a plurality of beam dividing part and the cylinder lens for performing linear transform of divided beam. The line beam laser unit(20) comprises the light source, the beam splitter(21), the spherical surface lens(22), the cylinder lens(23) oscillating the laser beam(L). The laser beam is divided into a plurality of beams by the beam splitter. The line beam is transformed to the spherical surface lens and cylinder lens. The beam splitter comprises two reflective mirrors and diffraction grating beam splitter. The diffraction grating beam splitter is arranged between the two reflective mirrors, divides the beam with the designated angle and transmits it. A plurality of divided beams is projected in the spherical surface lens. A plurality of beams which is projected in the spherical surface lens In the different direction is parallelly progressed by the spherical surface lens.