发明名称 SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To miniaturize a semiconductor device in which electrical characteristics are measured by using an FET check transistor. SOLUTION: The semiconductor device 100 is configured so that the electrical characteristics are measured by using a pad part 140g for a gate, a pad part 140s for a source and a pad part 140d for a drain before forming a passivation film 115 covering the pad part 140g for the gate, the pad part 140s for the source and the pad part 140d for the drain in the manufacture process. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009016586(A) 申请公布日期 2009.01.22
申请号 JP20070176898 申请日期 2007.07.05
申请人 NEC ELECTRONICS CORP 发明人 ARAI KENICHI
分类号 H01L21/66;H01L21/768;H01L29/78 主分类号 H01L21/66
代理机构 代理人
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