| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum apparatus which moves an electron beam lens barrel relative to a sample fixed in a vacuum chamber, and enables a baking process via the electron beam lens barrel with a simple configuration without losing mobility. SOLUTION: The vacuum apparatus includes the vacuum container 21, the electron beam lens barrel 10 placed in the vacuum container 21, moving mechanisms 60a, 60b, 61a, 61b, 70, and 71 which move the electron beam lens barrel 10 in the vacuum container 21, and a sample holding unit 22 which holds the sample S exposed to an electron beam emitted from the electron beam lens barrel 10 in the vacuum container 21. The vacuum apparatus further includes a heating means 80 which is disposed on the periphery of a moving range of the electron beam lens barrel 10 moved by the moving mechanisms 60a, 60b, 61a, 61b, 70, and 71 to heat the electron beam lens barrel 10. COPYRIGHT: (C)2009,JPO&INPIT
|
