| 摘要 |
PROBLEM TO BE SOLVED: To enable a temperature of the inside of a heating plate to be measured simply by using an emission pyrometer and a thermocouple at many points of the heating plate, in order to control the temperature of the heating plate and manage its temperature distribution precisely. SOLUTION: In an apparatus for measuring the temperature of the heating plate, a plurality of holes 7 are formed radially inside the heating plate 2, and a temperature-sensing piece 4 is disposed movably in each hole 7, and the temperature of the temperature-sensing piece 4 is measured, thereby measuring the temperature of the heating plate 2. For example, the emission pyrometer 5 which measures radiation heat of the temperature-sensing piece 4 through the hole 7, and the thermocouple 14 which measures the temperature of the temperature-sensing piece 4 under the condition of setting a temperature-sensing contact point on the temperature-sensing piece 4 through the hole 7, are used as means for measuring the temperature of the temperature-sensing piece 4. COPYRIGHT: (C)2009,JPO&INPIT
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