VACUUM PROCESSING DEVICE AND VACUUM PROCESSING METHOD

摘要

While an object (107) is being subjected to vacuum processing in a first processing chamber (101), an object to be processed next is heated at a loading section (108) of a second processing chamber (102). The object having been vacuum processed is unloaded to an unloading section (119) of the second processing chamber. The loading section and the unloading section move in the arrangement direction (Y) perpendicular to the direction (X) of conveyance of the object effected by a conveyance mechanism (202A). An object supported by the loading section is loaded into the first processing chamber. While vacuum processing is performed, a new object is supported by the loading section, an object supported by the unloading section is taken out of a second vacuum chamber, and the new object is preheated.