ELECTROMECHANICAL SWITCH AND METHOD OF MANUFACTURING THE SAME

摘要

An electromechanical switch and a manufacturing method thereof are provided to operate a switch with less electricity by using graphene which is easily transformed by an external electric field. An electromechanical switch comprises a source electrode(50), a gate electrode(10), a drain electrode(20) and an elasticity conductive layer(40). The source electrode, the gate electrode and the drain electrode are separated from each other on a substrate(100) and are arranged. The elasticity conductive layer moves with an electric field. The elasticity conductive layer comprises one or more graphene layers. The elasticity conductive layer is contacted to the source electrode. The elasticity conductive layer is separated from the gate electrode and drain electrode and is formed. One end of the elasticity conductive layer is contacted to the source electrode. The other end of the elasticity conductive layer is positioned above the drain electrode. The gate electrode is located on the substrate between one end and the other end of the elasticity conductive layer. A support stand(30) is arranged between the substrate and the source electrode.