| 摘要 |
An interface device for semiconductor equipment which converts messages of semiconductor equipment received and transmitted via different protocols to integral XML (extensible Markup Language) message format, and the monitoring system using same is capable of distributed or integral message monitoring of the semiconductor equipment. The monitoring system comprising an interface device for semiconductor equipment capable of converting messages of semiconductor equipment received and transmitted via different protocols to integral XML message format, and classifying the message converted to XML format based on message characteristic. A monitoring server provided with the XML messages classified and outputted by the interface device for semiconductor equipment to perform monitoring for each message characteristic, such that an integrated monitoring or a distributed monitoring for each message characteristic relative to the messages outputted from multiple semiconductor equipment can be made possible on the web portals.
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