STAGE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a stage apparatus capable of reducing moments generated by electromagnets due to rotation of a micromotion stage, and of reducing heat generation of a micromotion linear motor.

SOLUTION: This stage apparatus includes a first stage 104 and a second stage 105 mounted on the first stage 104. A linear motor 103 positions the second stage 105 relative to the first stage 104. A plurality of electromagnets 106a-106d accelerate and decelerate the second stage 105 relative to the first stage 104. A controller controls the electromagnets 106a-106d to reduce moments generated by the electromagnets due to rotation of the second stage 105.

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