COMPOSITE HARD CARBON FILM AND METHOD FOR PRODUCING THE SAME AND SLIDING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a composite hard carbon film which improves compatible characteristic in the friction early time of a carbon nitride film, to achieve an ultra-low frictional state from the extremely early stage of the friction early time. SOLUTION: The composite hard carbon film 20 is characterized by comprising a carbon nitride film 21 formed on a substrate 10 and a carbon coating film 22 formed on the carbon nitride film 21. The thickness of the carbon coating film 22 is preferably 1 to 500 nm, more preferably 2 to 4 nm. COPYRIGHT: (C)2009,JPO&INPIT