METHOD OF RECOVERING ABRASIVE FROM ABRASIVE SLURRY WASTE LIQUID AND APPARATUS THEREFOR

摘要

Not only small-diameter foreign matter but also large-diameter foreign matter mixed in polishing is effectively removed from an abrasive slurry waste liquid to thereby attain recovery of abrasive. Recovery of abrasive from an abrasive slurry waste liquid is accomplished by the use of a recovery apparatus comprising a high pressure jet disperser machine capable of mutual collision of abrasive slurry waste liquids as high pressure jet streams in a dispersion vessel; an ultrasonic strainer capable of, while applying ultrasonic waves to the dispersion liquid obtained by dispersion by means of the high pressure jet disperser machine and/or a barrier filter, straining the dispersion liquid through the barrier filter; and a cyclone capable of classifying of the filtrate liquid obtained by straining by means of the ultrasonic strainer.