| 摘要 |
In a method of cleaning a master disk according to the present invention, a self-adhesive surface sticking/peeling operation is performed on dust on the master disk by reciprocatingly oscillating the self-adhesive member while applying external forces in a plurality of directions. Dust on the master disk can be effectively removed by moving the self-adhesive member in this way and by using the adhesion of the self-adhesive member. Since the cleaning method according to the present invention is a removal method using a physical force, it has both the effect of removing organic materials and the effect of removing inorganic materials. Further, according to the present invention, the master disk to be cleaned can be cleaned in a state of being mounted on a disk holding member such as a holder. Therefore an apparatus of a comparatively simple construction can be applied in on-line form according to the cleaning method.
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