| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element which can easily improve adhesiveness of a substrate and a lower electrode without dropping piezoelectricity and withstand voltage and can improve durability. <P>SOLUTION: In the piezoelectric element, a diaphragm 103, adhesion layers 104 and 105, a lower electrode 106, a piezoelectric body layer 107 and an upper electrode 108 are constituted in this order. In a region where width A of the upper electrode 108, width B of the piezoelectric body 107 and width C of the lower electrode 106 are in a relation of A<B and A<C and thickness of the adhesion layers 104 and 105 corresponds to the piezoelectric body layer 107, at least a part of a region which does not correspond to the upper electrode 108 is thicker than the region corresponding to the upper electrode 108, or the region corresponding to the upper electrode 108 differs from at least a part of the region which does not correspond to the upper electrode 108 in a region where an adhesion layer material corresponds to the piezoelectric body layer 107. <P>COPYRIGHT: (C)2009,JPO&INPIT |
