| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor for preventing a mass body made of silicon from adhering on a first sealing board or a second sealing board made of glass. SOLUTION: The capacitance type acceleration sensor includes: an acceleration detecting part made of silicon comprising: the mass body 4 held in the air by having prescribed intervals to the first sealing board 1 and the second sealing board 11 respectively between the first sealing board 1 and the second sealing board 11 made of glass; a beam 7 connected to the mass body 4, supporting the mass body 4 in the air, and having elasticity made deformable; and fixed electrodes 8 provided by having prescribed intervals opposed to the mass body 4; and a joining frame 2 made of silicon provided so as to surround the circumference of the acceleration detecting part. At least either one of the first sealing board 1 and the second sealing board 11 has a contact part 13 contacting a part of the mass body 4 at an opposite position of the mass body 4. COPYRIGHT: (C)2009,JPO&INPIT |
