| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck mechanism having a soft jaw with high mounting repeatability. SOLUTION: The chuck mechanism for holding a work is equipped with a stage, a master jaw 50 provided in the stage, and a soft jaw 60 fixed to the master jaw. On each of faces against which the master jaw and the soft jaw abut mutually, a plurality of serrations 52a, 62a extending in two different directions is formed. These serrations are engaged with each other, and therefore, the soft jaw is not likely to displace in the face direction of the abutting face against the master jaw. The mounting repeatability of the soft jaw thereby becomes much high. COPYRIGHT: (C)2009,JPO&INPIT
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