发明名称 |
Alignment Correction System and Method of Use |
摘要 |
A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.
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申请公布号 |
US2009021236(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20070778679 |
申请日期 |
2007.07.17 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FOSTER ROBERT J.;ZHOU LIN;ZANGOOIE SHAHIN;YOUNG ROGER M.;BOTTINI CLEMENTE |
分类号 |
G01R19/00;G01C1/00 |
主分类号 |
G01R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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