| 摘要 |
An inkjet print head and manufacturing method includes a substrate, an insulating layer formed on a surface of the substrate to have an electrode formation space, an electrode formed in the electrode formation space to be positioned on the same plane with the insulating layer, a heater formed on upper surfaces of the insulating layer and the electrode, and a passivation layer formed on the insulating layer and the heater. The heater is formed to be flat on the insulating layer and the electrodes, thereby reducing the thickness of the passivation layer. Further, copper having relatively high electric conductivity is used as a material of the electrodes, which apply current to the heater to generate heat, instead of aluminum, thereby increasing a degree of freedom in the thickness of the electrodes. Further, uniform current can be applied to the respective heaters at different positions in single firing and full firing of ink, thereby reducing entire input energy and also improving ink ejection stability and reliability of the inkjet print head.
|
