发明名称 |
Laser-stripping of existing thin layer from workpiece along defined track, e.g. to make thin-film solar modules, employs elliptical focal zone having major axis forming angle with direction of travel |
摘要 |
The pulsed laser beam used, has an elliptical focal zone with minor- and major semi-axes (D1, D2). It is directed onto the stripping plane of a coated workpiece and guided along the track (A), forming overlapping focal zones on the plane. The major axis makes an angle (alpha ) with the track direction. In the new process, this angle exceeds 0[deg] and may be up to 90[deg] . The shape of the beam spot is restricted by the size of the minor semi-axis (D1). |
申请公布号 |
DE102007047469(B3) |
申请公布日期 |
2009.01.22 |
申请号 |
DE20071047469 |
申请日期 |
2007.09.28 |
申请人 |
JENOPTIK AUTOMATISIERUNGSTECHNIK GMBH |
发明人 |
LINKE, TORSTEN;SCHMIEDER, FRANK |
分类号 |
B23K26/073;B23K26/36;H01L21/268 |
主分类号 |
B23K26/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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