发明名称 Laser-stripping of existing thin layer from workpiece along defined track, e.g. to make thin-film solar modules, employs elliptical focal zone having major axis forming angle with direction of travel
摘要 The pulsed laser beam used, has an elliptical focal zone with minor- and major semi-axes (D1, D2). It is directed onto the stripping plane of a coated workpiece and guided along the track (A), forming overlapping focal zones on the plane. The major axis makes an angle (alpha ) with the track direction. In the new process, this angle exceeds 0[deg] and may be up to 90[deg] . The shape of the beam spot is restricted by the size of the minor semi-axis (D1).
申请公布号 DE102007047469(B3) 申请公布日期 2009.01.22
申请号 DE20071047469 申请日期 2007.09.28
申请人 JENOPTIK AUTOMATISIERUNGSTECHNIK GMBH 发明人 LINKE, TORSTEN;SCHMIEDER, FRANK
分类号 B23K26/073;B23K26/36;H01L21/268 主分类号 B23K26/073
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