| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means capable of easily supplying a target material with a low density suitable for an EUV light source. <P>SOLUTION: The EUV light source changes the target into a plasma state to emit EUV light from the generated plasma, wherein the target is discrete, the surface area of the target is ≥1.5 times that of a sphere having the material and mass identical to those of the target. <P>COPYRIGHT: (C)2009,JPO&INPIT |
