| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device excellent in flexibility and polishing capability regardless of a shape of a polishing object. <P>SOLUTION: The polishing device is equipped with: a workpiece holding member 11 holding a workpiece 10; a polishing tool 300 having a polishing agent 12A containing an electric rheology gel (ERG) and abrasive grains to polish the workpiece 10 by keeping the polishing agent 12A in contact with the workpiece 10; a tool holding member 310 holding the polishing tool 300; a rotary drive means 450 to rotate the polishing tool 300 or the workpiece 10 around the axis substantially orthogonal to the polishing surface; and a voltage applying means 123 to apply the voltage to the ERG. <P>COPYRIGHT: (C)2009,JPO&INPIT |
