DEVICE FOR MONITORING DEVICE FOR INTRODUCING GAS FOR ANALYSIS DEVICE

摘要

It is possible to accurately and stably supply a gas from a positive pressure (105Pa or above) into an analysis device under a high vacuum (10-2 Pa or below), maintain the same condition, reproduce it, and switch to a desired gas in a short time. A plurality of types of gas are mixed in a mixing chamber.The gas mixture is introduced and its pressure is reduced into a range from 0.1 Pa to 0.1 MPa by a pressure reducing pump. The gas of reduced pressure is introduced into the gas analysis device by a switching operation by a gas switching valve.