发明名称 |
Retaining Ring with Shaped Profile |
摘要 |
Retaining rings with curved surfaces are described. The curved surfaces prevent damage to a fixed abrasive polishing pad when the retaining ring is used in a polishing process. The curved surfaces are on the bottom surface of the ring, such as along the outer diameter and/or along the sidewalls of channels formed in the bottom of the ring.
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申请公布号 |
US2009021024(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20070780335 |
申请日期 |
2007.07.19 |
申请人 |
PRABHU GOPALAKRISHNA B;YUAN YIN;OH JEONGHOON;MENK GREGORY E |
发明人 |
PRABHU GOPALAKRISHNA B.;YUAN YIN;OH JEONGHOON;MENK GREGORY E. |
分类号 |
B65D45/32 |
主分类号 |
B65D45/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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