| 摘要 |
PROBLEM TO BE SOLVED: To form a metal thin film of high quality using metal microparticles. SOLUTION: When a fluid dispersion of metal particles is applied to a substrate and burned to form the metal thin film thereon, the rate of the change of a CO pressure in an atmosphere in a heating tank 11 is determined through measuring the CO pressure with a partial-pressure measuring apparatus 20. The time when the absolute value of the rate of the change of the CO pressure has become smaller than a predetermined value is judged as the time when the organic dispersing agent has been burned and removed, and the heating operation is finished. COPYRIGHT: (C)2009,JPO&INPIT
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