| 发明名称 |
ADDITIVE FOR DICING CUTTING WATER AND CUTTING WORK METHOD USING ITS ADDITIVE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an additive for cutting water preventing sticking of cutting chips to a hard plate-like material in dicing. SOLUTION: This additive for dicing cutting water does not include a water-insoluble component by 0.1 mass% or more, and includes a polymer having a monomer unit expressed by general formula (1) (in the formula, R<SP>1</SP>-R<SP>3</SP>respectively represent a hydrogen atom or a 1-8C hydrocarbon group) by 50 mass% or more, by 0.001-50 mass%. COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2009013301(A) |
申请公布日期 |
2009.01.22 |
| 申请号 |
JP20070177276 |
申请日期 |
2007.07.05 |
| 申请人 |
ADEKA CORP;DISCO ABRASIVE SYST LTD |
发明人 |
HOSAKA MASATAKA;BEPPU KOJI;KONDO YOSHIHIDE;OTANI HIDEAKI;SAKAI TOSHIYUKI;ICHINOZAWA TOMOKO |
| 分类号 |
C10M173/02;C10M149/10;C10N20/04;C10N30/00;C10N30/04;C10N40/22;H01L21/301 |
主分类号 |
C10M173/02 |
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