| 摘要 |
PROBLEM TO BE SOLVED: To detect a position of a ridge line in a surface shape of a sample by one scan, by a surface shape measuring machine for measuring the surface shape of the sample by detecting respectively each height from a prescribed reference face to each position on the surface shape of the sample. SOLUTION: This ridge line position detector 100 for detecting the position of the ridge line L in the surface shape of the sample W by the surface shape measuring machine 10 is provided with a maximum point detecting part 103 for detecting the maximum points P1, P3 where the height gets maximum when measuring the heights up to the respective positions in the respective positions on a prescribed closed loop C on the surface shape of the sample W, and a ridge line position calculating part 106 for calculating a position of a straight line connecting the two maximum points P1, P2 detected by the maximum point detecting part, as the position of the ridge line L in the surface shape of the sample W. COPYRIGHT: (C)2009,JPO&INPIT
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