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发明名称
Verfahren zur Herstellung einer Gateelektrode
摘要
申请公布号
DE69840320(D1)
申请公布日期
2009.01.22
申请号
DE19986040320
申请日期
1998.12.18
申请人
TEXAS INSTRUMENTS INC.
发明人
HATTANGADY, SUNIL V.;KRISHNAN, SRIKANTH;KRAFT, ROBERT
分类号
H01L21/28;H01L29/78;H01L21/314;H01L21/318;H01L21/3215;H01L21/336;H01L29/51;H01L29/786
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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