LOW CORE LOSS DIELECTRIC MATERIAL FOR HIGH FREQUENCY, METHOD FOR PRODUCING THE SAME, AND MEMBER THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a low core loss dielectric material having low dielectric loss and high thermal conduction in a high frequency region, to provide a method for producing the same, an to provide a member thereof.

SOLUTION: Disclosed is a low loss, dense, dielectric material for high frequency satisfying high thermal conduction and low dielectric loss and composed of a silicon nitride sintered compact essentially consisting of silicon nitride and comprising the group 3a compounds in the periodic table and impurity oxygen, in which the grain boundaries are crystallized, also, dielectric loss in 2 GHz and 3 GHz is ≤2×10-4, and thermal conductivity is ≥90 W×m-1×K-1. Also disclosed are a method for producing the same and a member thereof.

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