| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror device capable of restraining variation of a gap amount even if a movable mirror portion moves. SOLUTION: This micromirror device 1 includes a micromirror chip 10, an electrode substrate 30, and an intermediate spacer 50 sandwiched between the micromirror chip 10 and the electrode substrate 30 and having substantially the same shape as that of the micromirror chip 10, the intermediate spacer inhibiting a mirror support part 12 from being deformed by the moving movable mirror portion 14. The micromirror chip, the electrode substrate, and the intermediate spacer are arranged and stacked in a thickness direction. The intermediate spacer 50 has an opening 51 located substantially in the center thereof and a plate-like fixed member 53 having a plurality of through-holes 52 disposed around the periphery of the opening 51. The through-holes 52 are formed at desired distances. A junction member 55 is melted by desired heating and weighting and inserted and placed in each of the through-holes 52. When melted, the junction member 55 joins the micromirror chip 10 to the electrode substrate 30. COPYRIGHT: (C)2009,JPO&INPIT
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