| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a pattern forming body capable of designing the shape of a recessed part with a high degree of freedom. SOLUTION: The method of manufacturing the pattern forming body comprises a mask layer forming step for forming a mask layer having an opening part on a substrate, a first etching step for forming a recessed part and a flat part between the recessed parts by etching the substrate through the opening part, a protection part forming step for forming the protection part on the surface of the recessed part through the opening part, a mask layer peeling step for peeling off the mask layer after forming the protective part, and a second etching step for etching the mask layer of the flat part between the recessed parts exposed by peeling off the mask layer. The problem is dissolved by providing the method of manufacturing the pattern forming body. COPYRIGHT: (C)2009,JPO&INPIT
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