| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently simplify a complicated mechanical component, electric equipment or the like occupying a large installation space by incorporating as a main actuator for a semiconductor manufacturing device, laborsaving machinery, or transport equipment such as an aircraft, as an alternative to an air cylinder or a hydraulic cylinder of a device sliding a work part. SOLUTION: A hollow shaft motor is installed to a screw rod, and screw nuts are installed on both sides thereof. Along with rotation of the hollow shaft motor, through a connected shock absorbing part, one screw nut on a main driving side and the other screw nuts on a driven side are equally rotated to slide the screw rod with the rotation restricted. If the screw rod is fixed, a motor part can be slid. Since the shock absorbing part is needed, even when changes occur in each part caused by temperature change shift or an error can be absorbed by a clearance between meshing of gears or minute movement in an axial direction to allow smooth transmission. An added value of the device can be dramatically increased, by saving an installation space or simplifying a mechanical element, and by incorporating the device as a main actuator for a semiconductor manufacturing device, laborsaving machinery or transport equipment such as an aircraft, as an alternative to the conventional cylinder. COPYRIGHT: (C)2009,JPO&INPIT
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