发明名称 Structures of and methods for forming vertically aligned Si wire arrays
摘要 <p>A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.</p>
申请公布号 AU2008275878(A1) 申请公布日期 2009.01.22
申请号 AU20080275878 申请日期 2008.07.18
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 MICHAEL A. FILLER;NATHAN S. LEWIS;HARRY A. ATWATER;BRENDAN M. KAYES
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址