发明名称 |
Structures of and methods for forming vertically aligned Si wire arrays |
摘要 |
<p>A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.</p> |
申请公布号 |
AU2008275878(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
AU20080275878 |
申请日期 |
2008.07.18 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
MICHAEL A. FILLER;NATHAN S. LEWIS;HARRY A. ATWATER;BRENDAN M. KAYES |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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