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发明名称
POLYMERIC ANTIREFLECTIVE COATINGS DEPOSITED BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
EP1502292(A4)
申请公布日期
2009.01.21
申请号
EP20030747615
申请日期
2003.04.28
申请人
BREWER SCIENCE, INC.
发明人
SABNIS, RAM, W.
分类号
G03F7/11;H01L21/20;B05D7/24;C09D4/00;C09D165/00;G02B1/11;G03F7/09;G03F7/16;H01L21/027;H01L21/312;H01L21/36
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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