发明名称
摘要 <p>PROBLEM TO BE SOLVED: To provide a polishing liquid composition which improves the polishing speed, decreases the surface defects such as scratches or pits, and improves the surface smoothness such as surface roughness (Ra) and waviness (Wa); a polishing method using the composition; and a magnetic disk substrate improved in surface smoothness such as surface roughness (Ra) and waviness (Wa) and a method for producing the same. SOLUTION: There are provided a polishing liquid composition [1] containing silica particles, water, and an Fe salt and/or an Al salt of a polyaminocarboxylic acid; a polishing liquid composition [2] containing an inorganic acid and/or an organic acid in addition to all the ingredients contained in composition [1]; a polishing method using composition [1] or [2]; a method for producing a magnetic disk substrate having a polishing step using composition [1] or [2]; and a magnetic disk substrate produced by using composition [1] or [2].</p>
申请公布号 JP4213858(B2) 申请公布日期 2009.01.21
申请号 JP20000345113 申请日期 2000.11.13
申请人 发明人
分类号 C09K3/14;B24B37/00;G11B5/84 主分类号 C09K3/14
代理机构 代理人
主权项
地址
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