SEMICONDUCTOR COMPONENTS AND SYSTEMS HAVING ENCAPSULATED THROUGH WIRE INTERCONNECTS (TWI) AND WAFER LEVEL METHODS OF FABRICATION

摘要

A semiconductor module system includes a module substrate and a semiconductor substrate having a through wire interconnect bonded to an electrode on the module substrate. The through wire interconnect includes a via, a wire in the via having a first end bonded to a substrate contact on the semiconductor substrate and a polymer layer at least partially encapsulating the wire. The semiconductor module system can also include a second substrate stacked on the semiconductor substrate having a second through wire interconnect in electrical contact with the through wire interconnect.