Method of producing an electric connection using nanotubes and having air gaps

摘要

The method involves forming a target layer (3) made of degradable material, on a lower conducting layer (2) and forming an orifice in the layer (3). A flat insulation layer (8) traversed by hollow cylindrical carbon nanotubes (6), is deposited on the layer (3). The layer (3) is selectively degraded by hydrofluoric acid. The nanotubes are projected from the orifice, where the nanotubes form passages between the layer (3) and the exterior for chemical degradation agent and sub-product formed during degradation. An upper conducting layer (11) electrically connected to the layer (2), is formed.