发明名称 Combustion chemical vapour deposition
摘要 Atmospheric pressure combustion chemical vapour deposition process (CCVD) for depositing metal or metal like films using water soluble precursors. The deposition of a silver layer is explored using nebulisation precursor delivery of a silver aqueous solution. Silver is deposited primarily as islands which enlarge and coalesce to form a continuous thin film. The microstructure/nanostructure of the films can be controlled by optimising the deposition conditions.
申请公布号 GB2451130(A) 申请公布日期 2009.01.21
申请号 GB20070014167 申请日期 2007.07.20
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 DAVID WILLIAM SHEEL
分类号 C23C16/453 主分类号 C23C16/453
代理机构 代理人
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