| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspecting device by which relative remaining vibration between an XY stage obtained after a slide glass is moved and an optical system is eliminated and by which a holding means can be easily adjusted. SOLUTION: As to this inspecting device, the XY stage 181 is integrally attached below a surface plate 180 supported by a supporter 185, and the optical system 183 is integrally attached above the surface plate 180. The engaging part 181a of the stage 181 is engaged with the supporting part 180a of the surface plate 180, so that the stage 181 is attached to the surface plate 180 in a suspending state. A chuck means as the holding means is attached to the stage 181, and two pairs of forks 190 and 191 superpose both ends of the slide glass G in the longitudinal direction from upper and lower parts. |
