发明名称 METHOD FOR PRODUCING AN INTEGRATED CIRCUIT
摘要 The invention relates to a method for producing an integrated circuit. According to said method, a circuit structure (20) is produced in a defined section (18) of a semiconductor wafer (10). The defined wafer section (18) is then cut out of the semiconductor wafer (18) by first exposing the wafer section (18) until it is held only via local, web-like connections (24) on the remaining semiconductor wafer (10). The web-like connections (24) are then severed. According to an embodiment of the invention, the wafer section (18) is exposed in such a manner that the web-like connections (24) are arranged in a lateral periphery of the wafer section (18).
申请公布号 KR20090008224(A) 申请公布日期 2009.01.21
申请号 KR20087025045 申请日期 2007.03.06
申请人 INSTITUT FUR MIKROELEKTRONIK 发明人 BURGHARTZ JOACHIM N.;APPEL WOLFGANG;ZIMMERMANN MARTIN
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
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