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发明名称
METHOD AND APPARATUS FOR MEASURING A SURFACE POINT ON A WORKPIECE
摘要
申请公布号
EP2016368(A1)
申请公布日期
2009.01.21
申请号
EP20070724715
申请日期
2007.04.28
申请人
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
发明人
AUBELE, EUGEN;GRUPP, GUENTER;BERNHARDT, RALF;BENDZULLA, KLAUS
分类号
G01B21/04
主分类号
G01B21/04
代理机构
代理人
主权项
地址
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