INSPECTION APPARATUS AND SUBSTRATE PROCESSING SYSTEM

摘要

An inspecting apparatus and a substrate processing system are provided to pick up an image of the substrate accurately by improving flatness of an upper surface of the substrate. An inspection apparatus(1) includes a first transfer unit(5) and a second transfer unit(6). The first transfer unit and the second transfer unit transfer the substrate horizontally. A support unit(2) is installed between the first transfer unit and the second transfer unit and floats and supports the transferred substrate. One line of x axis of the floated and supported substrate is image-picked up by a line camera(31). The support unit floats and supports the substrate by the air outputted from a floating stage while being separated from the substrate.