| 摘要 |
An apparatus for generating atmospheric-pressure plasma is provided with substrates (2, 22); antennas (3, 17, 26, 38) arranged on the substrates (2, 22); discharge tubes (4, 18, 28, 37) arranged in the vicinity of the antennas (3, 17, 26, 38); a high-frequency power supply (8) for supplying VHF-band high-frequency power to the antennas (3, 17, 26, 38); and a matching circuit (7) which inputs high frequency from the high-frequency power supply (8) and adjusts the reflection waves. A phase circuit (6) is connected between the matching circuit (7) and the antennas (3, 17, 26, 38). The circuit constant of the phase circuit (6) is so set as to have a position, at which the current amplitude of a standing wave is maximum, or a position, at which the voltage amplitude of the standing wave is minimum, in the vicinity of the antennas (3, 17, 26, 38). |
