发明名称 Method for manufacturing surface acoustic wave device and surface acoustic wave device
摘要 A method for manufacturing a surface acoustic wave device includes the steps of forming an IDT electrode, a first wiring pattern, and a third wiring pattern on a piezoelectric substrate, forming an insulating film covering the IDT electrode and the wiring patterns, forming a photosensitive resin film, obtaining the photosensitive resin film, and forming a second wiring pattern on an insulating layer composed of the insulating film and the photosensitive resin film laminated on the insulating film so that the second wiring pattern three-dimensionally crosses the first wiring pattern.
申请公布号 US7479852(B2) 申请公布日期 2009.01.20
申请号 US20080118845 申请日期 2008.05.12
申请人 MURATA MANUFACTURING CO., LTD. 发明人 TAKAMINE YUICHI
分类号 H03H9/145;H03H3/08;H03H9/64 主分类号 H03H9/145
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