发明名称 Methods of applying substrate bias to SOI CMOS circuits
摘要 The present invention relates to methods for reducing the threshold voltage difference between an n-type field effect transistor (n-FET) and a p-type field effect transistor (p-FET) in a complementary metal-oxide-semiconductor (CMOS) circuit located on a silicon-on-insulator (SOI) substrate. Specifically, a substrate bias voltage is applied to the CMOS circuit for differentially adjusting the threshold voltages of the n-FET and the p-FET. For example, a positive substrate bias voltage can be used to reduce the threshold voltage of the n-FET but increase that of the p-FET, while a negative substrate bias voltage can be used to increase the threshold voltage of the n-FET but reduce that of the p-FET. Further, two or more substrate bias voltages of different magnitudes and/or directions can be used for differentially adjusting the n-FET and p-FET threshold voltages in two or more different CMOS circuits or groups of CMOS circuits.
申请公布号 US7479418(B2) 申请公布日期 2009.01.20
申请号 US20060329643 申请日期 2006.01.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CAI JIN;HAENSCH WILFRIED E.;NING TAK H.
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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