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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
KR100878940(B1)
申请公布日期
2009.01.19
申请号
KR20020038531
申请日期
2002.07.04
申请人
发明人
分类号
C23C16/40;H01L27/108;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;(IPC1-7):H01L27/108
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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