| 摘要 |
A Wobbe index measuring sensor and system are provided to detect the energy content in the fuel whereby a plurality of diaphragm layers are formed in the sensor. A Wobbe index measuring sensor comprises a silicon substrate(12), a diaphragm layer(16) including a first layer(18) including one or more heating elements containing doped polysilicon carbide and a second layer(20) including undoped polysilicon carbide layer, a sensing layer(22) including catalyst and arranged on the diaphragm layer, and a cavity formed under the diaphragm layer in order to insulate the heating elements. The first layer is to sense the energy content in the fuel and the second layer is to prevent the oxidation of the first layer.
|
