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发明名称
曝光设备及装置制造方法
摘要
一种曝光设备被组构成藉着经由光罩使基板曝露至光线而将图案转印至该基板。该设备包括一检查单元,其被组构成检查该光罩;一曝光单元,其被组构成经由藉着该检查单元所检查之光罩使该基板曝露至光线;及一控制器,其被组构成控制该检查单元与该曝光单元。该控制器(i)设定该光罩的一局部区域,(ii)造成该检查单元检查该光罩,该局部区域系设定在该光罩上,及(iii)如果该检查单元于该局部区域中未发现异常,则造成该曝光单元经由该局部区域将该基板曝露至光线。
申请公布号
TW200903580
申请公布日期
2009.01.16
申请号
TW097107673
申请日期
2008.03.05
申请人
佳能股份有限公司
发明人
河原淳
分类号
H01L21/027(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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