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发明名称
电浆处理装置
摘要
本发明防止异常放电落于电浆处理装置之接地电极之喷出口之内表面上。于电浆处理装置之接地电极40之朝向电场施加电极30的放电面42上配置介电构件60。于介电构件60上形成与电极间之放电空间1p相连之喷出导孔62,于接地电极40上形成与喷出导孔62相连之喷出口41。使介电构件60之喷出导孔62之内表面较接地电极40之喷出口41之内表面更突出。于介电构件60上设置自与接地电极40之抵接面63在一面上延长之阶差面64。
申请公布号
TW200904262
申请公布日期
2009.01.16
申请号
TW097111093
申请日期
2008.03.27
申请人
积水化学工业股份有限公司
发明人
竹内裕人;中森勇一;功刀俊介
分类号
H05H1/24(2006.01);H01L21/3065(2006.01)
主分类号
H05H1/24(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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