发明名称 VACUUM SEAM JOINING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To more reliably carry in/carry out a tray having packages loaded thereon in a vacuum seam joining apparatus for sealing the packages in a vacuum chamber. <P>SOLUTION: The vacuum seam joining apparatus includes a vacuum replacement chamber 2 communicating with a vacuum chamber 1 via a gate valve 3, a tray 4 which has first and second positioning holes and loads a plurality of packages thereon, a moving block 6 which has a convex portion fit into the first positioning hole to limit a displacement of the tray 4 and travels between the inside of the vacuum replacement chamber 2 and the inside of the vacuum chamber 1 through the gate valve 3 while supporting the tray 4 on the top surface, and a holding mechanism 7 which has a positioning pin 12 fit into the second positioning hole and a pair of hooks 10A and holds the tray 4. The holding mechanism 7 has pressing portions 13 for elastically pressing the tray. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009010243(A) 申请公布日期 2009.01.15
申请号 JP20070171525 申请日期 2007.06.29
申请人 NIPPON AVIONICS CO LTD 发明人 MURAKAMI KATSUYUKI;YAHAGI KATSUMI
分类号 H01L23/02 主分类号 H01L23/02
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