| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor that has a simple structure, is easily manufactured, is small, and also has high detection sensitivity of the acceleration. <P>SOLUTION: This acceleration sensor 10 comprises: a supporting material 1 formed of a frame section 1a and a plate-like oscillating section 1b extending from part near the center in the thickness direction of the frame section 1a to the inside of the frame section 1a; first and second piezoelectric elements 3 and 4 that are attached to the upper and lower surfaces of the oscillating section 1b of the supporting material 1, respectively, and have charge detection electrodes on the upper and lower surfaces of a piezoelectric substrate; a first lid material 7 whose lower surface is joined to the upper surface of the frame section 1a of the supporting material 1; and a second lid material 8 whose upper surface is joined to the lower surface of the frame section 1a of the supporting material 1. An interval between the first piezoelectric element 3 and the first lid material 7, and an interval between the second piezoelectric element 4 and the second lid material 8 are easily set, so that the intervals are easily set small, and the acceleration sensor 10 is made small. <P>COPYRIGHT: (C)2009,JPO&INPIT |
