| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of reliably performing air-tight sealing of a gap without making a manufacturing process complicated, and to provide a liquid droplet discharge head, a liquid droplet discharge device, and to provide the manufacturing method of the electrostatic actuator, the manufacturing method of the liquid droplet discharge head, and the manufacturing method of the liquid droplet discharge device. SOLUTION: The liquid droplet discharge head 100 comprises: a cavity substrate 3; an electrode glass substrate 4; and a nozzle substrate 1 on which a nozzle hole 5 for discharging droplets transferred from a pressure chamber 7 is formed, wherein a protruded part 35 for joining a part of a separate electrode 17 to the cavity substrate 3 is formed on the electrode glass substrate 4 to seal the gap 18 together with the part of the separate electrode 17 formed on the cavity substrate 3 and the protruded part 35. COPYRIGHT: (C)2009,JPO&INPIT
|
